Design and Simulation of MEMS Based Electrothermal Micromirror for 3D Spatial Movement

In this paper, we have addressed the design and simulation results of an electrothermally driven micromirror that is capable of producing in-plane as well as out-ofplane displacements. The coupled multiphysics simulation and study of the electrical, thermal and most importantly the mechanical behavior of the mirror system is done using COMSOL Multiphysics. The device has an in-plane displacement range of 3.56 μm (1.78 μm in either direction). An out-of-plane displacement of approximately 22μm is achieved for an input voltage of only 2V. The ability of precise control of movement of the micromirror in space is likely to lead to potential applications in diverse fields.